Semiconductor and Electronics
HIGH-PERFORMANCE SPECIALIZED HANDLING ROBOTS
Kawasaki offers a full line of industry-leading semiconductor and electronics handling robots. These robots are built for use in cleanroom applications, including ISO Class 1. Speed, accuracy, and reach make these robots ideal for handling delicate semiconductor wafers, LCD panels, organic EL, and solar panels.
_SMOOTH OPERATION
The NTS and TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision.
_UNIQUE AND HIGHLY RIGID TELESCOPIC MECHANISM
The TTS series design utilizes the NTS series horizontal articulated arm with a highly rigid telescopic base, delivering high-speed handling in high and low positions.
_COMPLIANT WITH SEMI STANDARDS
The NTS and TTS series satisfy the SEMI-F47 standard. It also meets the SEMI-S2 standard with sufficient consideration given to the environment and personal safety.